Flying second laser makes film of small filter of metal of equipment array aperture

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Choose stainless steel, copper and aluminium film of 3 kinds of metals regards an experiment as material, ply M of μ of 10 ～ 50. To stainless steel, copper and aluminium film of 3 kinds of metals has flying second laser beam machining, the small offer that considered to form rice aperture diameter and flying second the relation of parameter of laser beam machining. The result makes clear, the small hole diameter of laser beam machining follows flying second to increase and increase of odd pulse energy and the square root that pulse counts. Laser of second of comfortable Yu Fei makes stainless steel film can belong to small hole film, in 25 μ . The preparation on the stainless steel film with deep M too aperture of area array badge, aperture diameter is 2. M of μ of 5 ～ 10, aperture span is 10 ～ 50 μ M. Filter with aperture of badge of traditional agglomeration metal film is compared, film of metal of small hole of array of preparation of flying second laser has velar opening measure size of opening of form of via of even and consistent, blind, film and span can accuse to wait for a characteristic, can achieve higher hole rate. 1 foreword is mixed in beverage of biology pharmacy, beer the domain such as industrial sewage disposal, often use small hole film to undertake water quality depart filters. The organic film that the film of small hole depart that uses in great quantities at present has high polymer material to make and the film of pottery and porcelain that use agglomeration legal system to make and metallic film. Intensity of organic film machinery is low, life is brief. Film of pottery and porcelain has taller brittleness, not impulse withstand. Agglomeration metal film has taller intensity character, but the confine as a result of material and agglomeration craft, size of velar opening size differs, velar opening orientaton tilts mixed and disorderly distributing, the hole that causes it is led and connect fully function is inferior. The article put forward to use metallic film to make base material, use exceed short pulse laser beam machining to form array aperture to make a metal filter experimental program of film. This metal filters film has the obdurability with metallic more expensive stuff not only can, and the hole that the straight via that array distributings is helpful for raising metallic film is led and connect show performance. Exceed short pulse to stimulate smooth small treatment to already made the vital technology that small accept makes in recent years. Laser diode smokes carry solid laser (system of DPSS) laser small treatment can dig small hole, but its pulse width is in accept second to measure level, treatment metal stuff can produce bigger heat to affect an area, aperture brim appears slaggy with hard condensation layer, very difficult preparation is admirable the metallic film opening of the class of small accept rice of function, because metallic stuff has rate of very tall heat conduction,this is, relax of phonon ／ electron pleaseds time is in leather second class mostly. Become only laser action arteries and veins is wide be less than time of comfort of relax of electron of ／ of metallic towel phonon, photon energy instant is absorbed by character and morals, material has not enough time to produce a cattle heat is conducted and the instant by aerification, ability generation adds " without hot laser. Accordingly, flying second laser is narrow the advantage of pulse width makes the admirable instrument that its make class of small accept rice machine. To press the application of this technology, from flying second laser and metallic film interaction mechanism already began a lot of research to accurate stiletto technology. But this technology still is in development phase. The article basically brings pair of metals that make to filter velar requirement, choose 3 kinds of metals (stainless steel, aluminium and copper) velar stuff, began flying second experiment of relation of parameter of laser beam machining and large area array make small hole test, discuss small offer of flying second laser processing technique is used at preparation new-style metal filters velar possibility. Copper of 2 experiments choice, aluminium and stainless steel J are planted metallic film regards an experiment as material, their ply is M of μ of 12 ～ 25 respectively, 20 μ M mixes 9 ～ 50 μ of 20 ～ M. Use cost to consider industry, all metallic film stuff all choose industrial course. System of flying second laser undertakes the titanium gem that uses production of company of American spectral physics metallic film makes small hole test, its main technique parameter is: Central wavelengh 800 Nm, pulse repeats frequency 1000 Hz, ～ 10 Ps of pulse width 400 Fs, 2 MJ of odd pulse energy. Use sample of jiggle platform shift, its locate precision is 1 μ M. Consumed learns microscope (OM) and scanning report lens (the form appearance of small hole of SEM) observation laser. 3 tests result and discuss 3. The relation of diameter of 1 small hole and parameter of flying second laser flies energy of second laser odd pulse is right film of 3 kinds of metals (stainless steel, aluminous, copper) the influence experiment curve of small treatment aperture is shown respectively at graph 1(a) ～ (in C) . The analysis is knowable, e of odd pulse energy and D of small hole diameter present kind of parabola function D2 of relation E ∝ . This can make an explanation according to relation of conversation of energy: In achieve condition of ablation threshold value to fall, place of stuff of purify small hole needs energy to be equal to energy of Ju pulse laser. The energy of laser odd pulse that your E requires to achieve ablation Fujian to be worth place, d is the diameter of aperture, h is the ply of metallic film, l ρ is compared to destroy can pursue 2(a) ～ (C) is stainless steel, copper and aluminium respectively the influence curve that pulse of small treatment of laser of flying second of 3 kinds of material counts pair of bore diameter volume. Visible, laser pulse number is similar to the influence of odd pulse energy to bore diameter size to the influence of bore diameter size, present a diametical size to count the concern that square root increases and increases along with laser pulse. Can conclude from this: Begin phase, when pulse energy accumulative total exceeds material ablation threshold values, small hole is formed. Increase laser pulse number further, laser energy is bigger and bigger; Criterion by (3) type is knowable, bore diameter is bigger and bigger also. The relation experiment curve of diameter of small hole of laser beam machining of 3 kinds of material and laser pulse width is shown respectively at graph 3(a) ～ (in C) . Can see, inside interval of chooses laser pulse width, arteries and veins is wide very small to influence of variation of bore diameter size. Because of chosen laser arteries and veins wide range is 50 ～ 400 Fs, far report of ／ of the phonon in be less than metallic stuff grants relax comfort time 2 ～ 7 Ps; Inside wide range of arteries and veins of this flying second laser, material is rapid aerification, energy is not had accumulate, do not send cause bore diameter to increase. 3. Small hole of 2 array metal filters velar structure and function use a second to stimulated finishing to have stainless steel (M of μ of ply 25, pulse energy 180 μ J, wide 100fs of arteries and veins, pulse number 100) and aluminium (M of μ of ply 9, odd pulse energy 100 μ J, wide 50 Fs of arteries and veins, pulse counts 20) bedding face to accumulate film of array small hole, enlarge form appearance shows lens of its scanning report to be mixed at graph 4(a) respectively (B) . See from graph 4(a) , the film of metal of aperture of stainless steel array of preparation of flying second laser has good structural characteristic: They are direct aperture, aperture edge is clear, without splatter Yuan Rong broken bits. Bore diameter size is the smallest can amount to 2. 5 Pm, and aperture diameter dimension is in 2. 10 μ of 5 ～ between M adjustable; The smallest span can amount to small hole M of 10 μ , realize 10 ～ easily span of 50 μ M is adjusted, accordingly but the velar opening pattern that preparation gives hole to lead the 2 dimension array that is as high as 65 ％ to distributing. Classics test, the flux that show water amounts to 400 L ／ (× of H · Cm2) 0. 1 MPa(equivalent appears ／ of LO-4L of × of water flux L (Pa)) of · of Min · Cm2. It is OK also to use flying second laser on aluminous metal film preparation gives straight via of 2 dimension array, see from graph 4(b) , m of μ of bore diameter 15, kong Jian is apart from 25 μ M, bore diameter size and Kong Wen are apart from also can be adjusted. Observe graph 4(b) carefully, can discover to shading of a few imperceptible strip appears all round velar opening, because stiletto craft parameter chooses,be being maintained via the analysis is of undeserved generation splatter content. Graph the 5 velar opening that are small orifice plate of metal of agglomeration of carry out of a kind of city scan design of appearance of electric lens form. Its main performance data is: Equivalent aperture 50 μ of 2 ～ M, hole leads 20 ％ ～ 40 ％ , the flux that show water is 1 × 10-5 L ／ (Pa) of · of Min · Cm2. Can see, with groovy agglomeration metal photograph of small hole film is compared, the small filter film of preparation of flying second laser has a few distinctive detached filterability can: Filter velar opening appearance is direct aperture, velar opening size agrees equably, velar opening diameter is less than film of agglomeration metal small hole all bore diameter dimension; Bore diameter size and aperture span also can be adjusted. The hole rate of metallic film increases significantly, the metal filters the flux of film that show water also has twice to rise. Energy of odd pulse of laser of flying second of 4 conclusion 1) and pulse number have very big effect to small treatment aperture, small hole diameter follows odd pulse energy or the square root of pulse number increases. Film of 2) stainless steel is comfortable at E second laser beam machining, go up in stainless steel film but preparation accumulates array small hole into bedding face, hole size 2. 5 ～ 10 Pm is adjustable, kong Jian is apart from 10 ～ 50 Pm adjustable. The film of small filter of stainless steel metal of preparation of laser of 3) flying second, have velar opening size to wait for distinctive detached filterability consistently equably can, can use at a few requirements to filter accurately the field such as dimension, if accurate pharmacy, essence refines labour,wait. CNC Milling